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Reactive-ion etching
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41	INTRACELLULAR NEURONAL RECORDING WITH FLEXIBLE MICRO-MACHINED PROBE IMPLANTS Anupama V. Govindarajan1, Tai C. Chen1, Russell C. Wyeth2, A. O. Dennis Willows2 and Karl F. Böhringer1 1 Department of Electrical Engineering Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2004-03-15 18:16:55 Neurophysiology Electrophysiology Microtechnology Semiconductor device fabrication Computational neuroscience Single-unit recording Multielectrode array Polyimide Deep reactive-ion etching Neuroscience Biology Science
42	Silicon Micro-Needles with Flexible Interconnections G. Holman1 , Y. Hanein1 , R. C. Wyeth2 , A. O. D. Willows2 , D. D. Denton1 , and K. F. Böhringer1 1 Department of Electrical Engineering, 2Department of Zoology, Univ Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2002-03-21 14:35:00 Microtechnology Technology Neurophysiology Deep reactive-ion etching Etching Microelectromechanical systems Multielectrode array Polyimide Wafer Semiconductor device fabrication Materials science Chemistry
43	A FULLY DRY SELF-ASSEMBLY PROCESS WITH PROPER IN-PLANE ORIENTATION Sangjun Park and Karl F. Böhringer Department of Electrical Engineering, University of Washington, Seattle, Washington, USA ABSTRACT A fully dry self-as Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2007-10-22 10:46:49 Technology Etching Deep reactive-ion etching Microfabrication Integrated circuit Three-dimensional integrated circuit Wafer Isotropic etching Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
44	Hindawi Publishing Corporation Journal of Nanomaterials Volume 2013, Article ID[removed], 6 pages http://dx.doi.org[removed][removed]Review Article Add to Reading List Source URL: downloads.hindawi.com Language: English - Date: 2014-08-28 12:52:18 Physics Microtechnology Plasma processing Spectroscopy Nanotechnology Etching Dry etching Reactive-ion etching Polymer Semiconductor device fabrication Chemistry Materials science
45	Sensors 2007, 7, [removed]sensors ISSN[removed] © 2007 by MDPI www.mdpi.org/sensors Add to Reading List Source URL: www.mdpi.org Language: English - Date: 2007-05-24 07:46:10 Electromagnetism Microelectromechanical systems Accelerometer Surface micromachining Piezoresistive effect Industrial etching Abrasive Deep reactive-ion etching Abrasive blasting Microtechnology Materials science Technology
46	Design and Fabrication of a Silicon-Based MEMS Rotary Engine Add to Reading List Source URL: www.me.berkeley.edu Language: English - Date: 2002-10-04 20:52:04 Technology Microelectromechanical systems Etching Deep reactive-ion etching Microfabrication Advanced Silicon Etch Photoresist Wankel engine Wafer Materials science Semiconductor device fabrication Microtechnology
47	Microsoft Word - AM172_Fang.doc Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2005-03-09 20:34:41 Chemistry Technology Nanotechnology Microelectromechanical systems Deep reactive-ion etching Etching Integrated circuit Wafer Self-assembled monolayer Materials science Semiconductor device fabrication Microtechnology
48	Molecular Devices: A Potential Replacement for Semiconductors Anthony Moeller NIST Semiconductor Electronics Division July 27, 2004 Add to Reading List Source URL: spsnational.org Language: English - Date: 2006-11-14 11:17:28 Technology Plasma processing Etching Reactive-ion etching Wafer Photolithography Chemical vapor deposition Microelectromechanical systems Semiconductor device fabrication Materials science Microtechnology
49	JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 3, JUNE[removed]Wafer-Level Packaging Based on Uniquely Orienting Self-Assembly (The DUO-SPASS Processes) Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2006-11-13 22:12:11 Technology Wafer Etching Deep reactive-ion etching Microelectromechanical systems Three-dimensional integrated circuit Thermal oxidation Photolithography LIGA Materials science Microtechnology Semiconductor device fabrication
50	INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng[removed]S91–S95 Add to Reading List Source URL: www.ee.washington.edu Language: English - Date: 2003-07-02 16:59:00 Technology Chemistry Deep reactive-ion etching Microelectromechanical systems Microfabrication Black silicon Etching Wafer Polyimide Materials science Semiconductor device fabrication Microtechnology

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